Surface nano Metrology facility
This facility is a specialised design for vibration minimisation. It is temperature controlled to ±0.5°C or better and is a class 10,000 clean room. Current equipment includes:
- atomic force microscope
- scanning electron microscope
- Taylor Hobson sponsored optical interferometer
- stylus-based form and surface texture instrument
- roundness and cylindricity measurement instrument.
Last updated Tuesday 20 November 2012
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